Tegal receives million-dollar order for diode plasma etchers News from E-InSiteTegal Corp. disclosed today that chipmaker TRW has purchased additional 901G diodeplasma etchers.
TRW will use the systems to etch 100mm gallium arsenide (GaAs) wafers that will be usedto manufacture heterojunction bipolar transistor (HBT) devices used in wirelesstelecommunications products. The order is valued at nearly $1 million and is scheduled tobe installed at TRW's Southern California facility during this fiscal year, Tegalsaid.
GaAs is a high-performance compound semiconductor, or “III-V” material, usedto make ICs for high-performance networks, data communications, cell phones and otherwireless telecommunication devices.
“Telecommunications ICs now account for almost half of all compound semiconductorsales,” said Jim McKibben, vice president of worldwide marketing and sales for Tegal.
Tegal, based in Petaluma, Calif., said more than 1,300 of its 900 Series systems havebeen installed worldwide. The systems reliable and repeatable results in etching a rangeof films used to make semiconductors, telecommunications and optoelectronic devices,flat-panel displays and thin-film magnetic heads.
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