MEMS stands for micro-electromechanical systems, as opposed to "Nano-electromechanical" systems (NEMS) and nanotechnology, into which they merge.
These "micro machines", which can integrate electronics, sensors, and mechanical elements on a silicon substrate, range in size from a micrometer to a millimeter.
They became a practical proposition with the advance of semiconductor fabrication technologies, such as wet etching and dry etching. Part of the MEMS chip will be fabricated using integrated circuit process sequences and part will be made via micromachining processes.
"Microelectronic integrated circuits can be thought of as the 'brains' of a system and MEMS augments this decision-making capability with 'eyes' and 'arms', to allow microsystems to sense and control the environment," is an analogy used by MEMSnet.org.
MEMS-based systems are targeted at automative, biomedical, and electronics markets, with a lot of R&D aimed at unlocking the potential of MEMS technology.
MEMS sensor generations are also represented by the progress of micro sensor technology. These range from basic first generation MEMS sensors, which are based on a silicon structure sometimes combined with analog amplification, to the singing and dancing fourth generation MEMS sensors, which see a fusion of a basic sensor element with analog-to-digital conversion, and support for linearisation and temperature compensation on one chip, along with with memory cells for calibration and temperature data.
In the following, we bring together resources from Electronics Weekly and UK and EU governmental bodies to provide detailed reference information about mems.
ELECTRONICS WEEKLY NEWS ON MEMS
Latest News
Previous news stories to note
Semefab builds third fab for MEMS
Fife-based Semefab is to offer prototype MEMS services, and will build a third wafer fab to increase productivity on its existing MEMS line.
Analog Devices extends MEMS motion sensor design
Analog Devices has developed a micromachined six degrees of freedom (6DOF) motion sensor for instrumentation and industrial use.
MEMS system firm gets funding
West Lothian MEMS equipment firm Point 35 Microstructures has received £2.2m in venture funding.
MEMS sensor will protect mobiles against falls
Freescale Semiconductor has expanded its range of micro-electromechanical systems (MEMS)-based sensors with a 3-axis digital-output accelerometer which is claimed to be one of the thinnest accelerometers on the market.
French MEMS firm takes initiative in growth market
Tronics Microsystems, the French MEMS manufacturer has expanded the characterisation, assembly, packaging and testing capabilities at its Crolles headquarters.
MEMS goes mainstream, says trade body
According to the trade association MEMS Industry Group (MIG), 2006 will be marked as the year in which MEMS made significant inroads into the consumer electronics market.
ST sets up 200mm MEMS fab
STMicroelectronics has inaugurated a new 200mm (8-inch) semiconductor wafer fabrication line dedicated to MEMS devices at its manufacturing site at Agrate, near Milan, Italy.
SiTime ships MEMS to replace crystals
SiTime, which makes CMOS MEMS replacements for quartz crystal resonators and oscillators, has started its first manufacturing run and plans to have made a million units by the end of the year.
Analog Devices European MD talks of MEMS and top designers
Thomas Wessel, managing director for European sales and marketing at Analog Devices, talks to EW about MEMS technology, the power/performcnec push-pull factor and how to recruit the best analogue designers.
US funds broadband diamond MEMS
Advanced Diamond Technologies (ADT) is to develop CMOS-compatible diamond-based MEMS for broadband communication applications with funds from US military organisation DARPA.
MEMS sensor start-up locates with Edinburgh's SMC
A MEMS sensor start-up has located at the Scottish Microelectronics Centre (SMC) in Edinburgh.
MEMS pump uses electric fields to cool chips
Engineers at Purdue University in the US have developed a micromachined pump to circulate cooling water through channels etched into a chip.
Qinetiq heads EU project to push MEMS for medical systems
A €6.5m European Commission project will try to reduce the cost and risks associated with designing, prototyping and manufacturing micro electromechanical systems (MEMS) based electronic devices.
OTHER RESOURCES
MEMS Technology
SEMI
MEMS Sensors
MEMS (Wikipedia)