Well this is very arguable but here, stretching from Julius Lilienfeld's 1926 patent filing for a solid state amplifier, through to Robert Dennard's field-effect transistor memory, are the ten most influential semiconductor scientists.
Julius Lilienfeld
Oskar Heil
Walter Brattain
John Bardeen
William Shockley
Jean Hoerni
Bob Noyce
Jack Kilby
Frank Wanlass
Robert Dennard
Paul Dirac laid out the groundwork of quantum mechanics on which the whole industry rests.
>groundwork of quantum mechanics
Planck, Schrodinger, Einstein?
Ferdinand Braun discovered semiconductors.
Also, how about Schottky, Ohl, Teal?