45nm and better processes account for half total revenues.
TSMC says it has 20 customers for its 16nm finfet process.
The company says it will set up a 300-400 person R&D lab to develop a 10nm process scheduled for trial production in 2015 and mass production in 2016.
Total capacity in 2013 was 15.67 million eight inch wafer equivalents. In 2012, it was 14.04 million.