The company is forecasting an 80% increase in turnover this year.
This follows the signing of a license agreement with major equipment supplier Lam Research.
"We have recently secured a global product licence from industry giant Lam Research which means that in future we will sell specific licensed legacy products directly to end-users throughout the world to develop our Scotland-based operation in the face of tough competition from other locations," said Don Nicolson, MD of Ichor Systems.
The company, formerly known as Semi Scenic, was founded in East Kilbride in 2003 and was acquired by US firm Ichor Systems in 2012.
"We have outgrown our existing 12,000 square foot plant in East Kilbride's Scottish Enterprise Technology Park where we have been since 2005," said Nicolson.
The new facility will create ten new jobs as well as securing the future of Ichor's existing staff.
Scottish Enterprise is providing a Regional Selective Assistance (RSA) grant of £175,000 to help with this expansion into new facilities.
"Ichor is a successful player in the global market and the move to these new premises will enhance its delivery of real value-added products and services to its customers throughout the world and exploit further growth opportunities," said Eleanor Taylor, Business Support Director, Scottish Enterprise.
The new site is expected to be ready for production before the end of the year.