X-Fab builds two new MEMS fabs

X-FAB Silicon Foundries has expanded its MEMS manufacturing capabilities in Erfurt and Itzehoe with two new dedicated MEMS fabs with cleanroom space totaling more than 2000 square metres.

MEMS devices manufactured at X-FAB include pressure sensors, micro-mirrors, microphones and microfluidic devices used in mobile, consumer, medical and automotive applications.

“With the two new dedicated MEMS fabs, we are well prepared for volume MEMS manufacturing and able to meet the growing demand we see from our customers,” says X-Fab’s Peter Merz.

In Erfurt, X-FAB will use 1300 square metres of new MEMS manufacturing space alongside its existing CMOS and MEMS semiconductor fabs on site. The new cleanroom will be used for high-volume manufacturing of 200mm MEMS and related processes with the first equipment to be installed in December this year.

In Itzehoe, X-FAB is moving its operation into a new state-of-the-art 1000 square metre fab commonly used with Fraunhofer ISIT.

In addition, X-FAB will expand its R&D cooperation with Fraunhofer Institute. The Itzehoe fab was opened last month with the first tools already installed.

“X-FAB offers a variety of CMOS processes for analog/mixed signal, high-voltage and power applications in combination with a wide range of MEMS process capabilities,” says Merz, “customers benefit from this one-stop-shopping approach. In addition, X-FAB simplifies the supply chain by supporting integration and interface challenges on all levels.”

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