300mm for Samsung

300mm for Samsung
David Manners ASM Lithography is supplying a 300mm lithography system to Samsung, and will have tools available for volume production in the second half of 1999, said ASML v-p Evert Polak, at last week’s Semicon Europa exhibition. “What we’re currently supplying is a pre-production tool for test patterning 300mm wafers with 0.25 micron structures,” said Polak. “We’re not expecting a quick ramp up of 300mm manufacturing. It will start with the pilot line type of fab next year.” Siemens had planned to use ASML steppers for their Dresden 300mm line but turned to Canon when ASML couldn’t meet the Siemens timescale.


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