Russian technology surfaces in the Valley

Russian technology surfaces in the Valley
David Manners A technique for thinning wafers based on Russian defence technology has been commercialised by a Silicon Valley start-up company. Called Tru-Si Technologies of Sunnyvale, the company uses an aggressive plasma developed at the University of Zelenograd near Moscow for destroying chemical and bacteriological weapons. Using a chamber which exploits the Bernoulli effect to suspend wafers without physical contact, Tru-Si’s machines thins wafers using an isotropic dry etch process to 100?m. The aim is to get down to 25?m. Tru-Si also plans to use the technology in flat panel displays and CVD systems. “We will be a company like Applied Materials,” Tru-Si’s president, Dr Sergey Savastiouk, told EW. “But smaller?” queried EW. “No” responded Savastiouk.


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