The pilot line project has a budget of €1.787bn, of which the EC funds €267m and local public authorities €265m.
The 14 pilot lines are:
AGATE (Development of Advanced GaN substrates & Technologies). Budget of €59.6m. EC will fund €8.8m, local PAs €12.9m.
E450EDL (European 450mm Equipment Demo) aims at demonstrating the readiness of 450mm semiconductor manufacturing equipment. The overall goal ofthe E450EDL project is to install a 450mm pilot line at Imec in Leuven, equipped with European systems implementing first critical modules.Budget of €205.7m. EC will fund €30.9m, local PAs €30.2m.
EPT300 and EPPL (Enhanced Power Pilot Line) are pilot-lines addressing the area of power semiconductors as well as advanced manufacturing challengesincluding handling and automation concepts for thin 300mm wafers and specialrequirements of More-than-Moore fabrication lines including also strategies forintegrated multi-wafer-diameter manufacturing. Budget of €74.8m. EC will fund €11.2m, local PAs €12.5m.
PLACES2BE (Pilot Lines for Adv. CMOS Enhanced by SOI in 2x nodes built in Europe) is a three-year advanced-technology pilot-line project to support the industrialisation of FD-SOI. Budget of €358.8m. EC will fund €52.6m, local PAs €45.9m.
DEMETER (DEep SubMicron System on Chip (SoC) for Harsh Environment applicaTions using EuRopean Technologies). Budget of €30.5mn. EC will fund €4.5mn, local PAs €2.8m.
E450LMDAP (European 450mm Lithography and Metrology Development for Advanced Patterning). Budget of €459.3m. EC will fund €68.9m, local PAs €34.9m.
eRamp (Excellence in Speed and Reliability for Moore-than-Moore Technologies. Budget of €55.2m. EC will fund €8.3m, local PAs €8.2m.
Lab4MEMS II (Micro-Optical MEMS, micro-mirrors and pico-projectors) aims to establish a European Pilot Line for key enabling technologies on advanced piezoelectric and magnetic materials, including advanced 3D Packaging technologies to meet the ever evolving market needs. Budget of €23.7m. EC will fund €3.6m, local PAs €6.7m.
PANACHE (Pilot line for Advanced Nonvolatile memory technologies for Automotive microControllers, High security applications and generalElectronics). Budget of €224.7m. EC will fund €33.7m, local PAs €42m.
PLACYD (Pilot Line for Self Assembly Copolymers Delivery). Budget is €15.5m. EC will fund €2.3m, local PAs €3.6m.
POLIS (Pilot Optical Line for Imaging and Sensing). Budget is €106.9m. EC will fund €16m, local PAs €19m.
THINGS2DO (THIN but Great Silicon 2 Design Objects) is a pilot-line project addressing subprogram 3. Energy Efficiency, 6. Design technologies and 4. Health and Ageing Society by utilising FD-SOI technology. Budget €120.8mi. EC will fund €18.1m, local PAs €30.8m.
ViDaP (VCSEL Pilot Line for IR Illumination, Datacom and Power Applications). Budget is €23.2m. EC will fund €3.5m, local PAs €5.1m.